Tiny resonators created using microfabrication are crucial for many uses, such as detecting mass, providing timing signals, and filtering. Various methods like piezoelectric, piezoresistive, and capacitive have been explored to make these resonators move and to sense that movement. This book aims to present and suggest different technological methods along with design ideas to improve the performance of capacitive silicon resonators. It will be a valuable resource for individuals working in the areas of micro and nanotechnology.
Additional Product Info :
ISBN 10 :
0367217767
ISBN 13 :
9780367217761
Publisher :
TAYLOR & FRANCIS
Language :
English
Dimensions :
6.5 x 0.5 x 9.5
Item Weight :
0.77 kg