Plasma Electronics, 2nd Edition: Applications In Microelectronic Device Fabrication
Hardcover
by Makabe Toshiaki Et.Al(Author)
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This revised edition details the physics of plasma and its use in semiconductor etching. It covers reactor design and surface interactions, offering a technical guide for engineers specialized in high-precision microelectronic device fabrication.
Additional Product Info :
ISBN 10 :
1482222051
1482222051
ISBN 13 :
9781482222050
9781482222050
Publisher :
Crc Press
Crc Press
Language :
English
English
Dimensions :
6.3 x 1 x 9.1
6.3 x 1 x 9.1
Item Weight :
0.74 kg
0.74 kg
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Top Selling Products
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$21.15
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$14.74
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$10.97
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$17.88
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